Instrumentation

Specialty Gas Regulators

Specialty Gas Regulators

Specialty Gas Regulators

High-performance regulators designed for specialty gas control, high and extremely high-pressure applications, and measurement instrument calibration. Developed with a focus on maximum stability and absolute tightness against leakage.

  • Specific models for high purity specialty gases
  • Single or double stage for high and extremely high pressure (up to 300 bar)
  • Optimized for critical analytical calibration processes
  • Construction in inert materials (316 Stainless Steel, PTFE)

Features, ranges, materials, standards, and certifications vary by model and manufacturer. Confirm the requirements against the current datasheet and technical proposal.

Description

High-performance regulators designed for specialty gas control, high and extremely high-pressure applications, and measurement instrument calibration. Developed with a focus on maximum stability and absolute tightness against leakage.

Key Features

  • Specific models for high purity specialty gases
  • Single or double stage for high and extremely high pressure (up to 300 bar)
  • Optimized for critical analytical calibration processes
  • Construction in inert materials (316 Stainless Steel, PTFE)
  • Certified tightness with factory helium test

Recommended Applications

Analysis of standard gases and specialty mixtures
Instrumentation calibration stations
Critical high-pressure process control
High-demand R&D laboratories

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Models and Technical Specifications

ULTRA HIGH PURITY (UHP) REGULATORS
IMAGEMODELDESCRIPTIONAPPLICATION
RG1Designed for point-of-use medium flow to be used in process gas cabinets. Precise control of gas pressure at or near the process tool for flow rates of up to 250 SLPM at 300 PSIG inlet.UHP Systems
RG1AHigh precision UHP regulator for specific low-flow applications. Features advanced metal-to-metal diaphragm seal for enhanced leak-tight integrity.UHP Systems
RG2Designed for optimal pressure control in ultra high purity gas delivery systems. Exceptional stability under varying inlet pressures.UHP Systems
RG2AAdvanced version of RG2 with specialized internal surface finish for minimal particle generation and entrapment.UHP Systems
RG3Ultra high purity regulator engineered for high flow and superior reliability in critical semiconductor manufacturing processes.UHP Systems
RG4Compact UHP pressure regulator optimized for OEM equipment and compact gas panel integration.UHP Systems
BRG3Bulk high purity regulator for central gas supply systems and large-scale gas distribution networks.UHP Systems
MRG3Miniature UHP regulator designed for tight spaces without compromising on pressure control precision and purity.UHP Systems
MRG4Compact medium flow regulator with excellent droop characteristics for sensitive analytical instrumentation.UHP Systems
MRG5High-performance miniature regulator offering stable delivery pressure across a wide range of flow rates.UHP Systems
MRG6Specialized miniature regulator with enhanced corrosion resistance for aggressive specialty gases.UHP Systems
MRG7Ultra-compact regulator featuring internally tied diaphragm for positive shutoff and enhanced safety.UHP Systems
AHFRGAbsolute high flow regulator designed for precise control of bulk gas delivery in facility systems.UHP Systems
HFRGHigh flow regulator specifically engineered for bulk specialty gas systems (BSGS) and large process tools.UHP Systems
HFRG2Second-generation high flow regulator with improved low-pressure operation and enhanced stability.UHP Systems
HFRG3Optimized high flow regulator providing superior performance for demanding semiconductor facility applications.UHP Systems
HFRG4Latest generation high flow regulator with ultra-sensitive control and maximum reliability for critical UHP gases.UHP Systems
MGC1Multi-gas controller and regulator unit designed for complex gas mixing and highly precise flow management.UHP Systems
CENTRAL CHANGEOVER PANELS AND MANIFOLDS
SYSTEM IMAGEMODELODESCRIPTIONAPPLICATION
Dual Central Automatic Switchover PanelCentral distribution panel and manifold with automatic cylinder bank switchover, ensuring seamless, uninterrupted gas supply.High-pressure gas control and multi-point distribution
Wall-Mount Manifold SystemWall-mounted manifold system with high-precision isolation valves and gauges for independent multi-line process control.High-purity gas distribution for analytical labs and critical industrial processes
Integrated Regulation Skid ModuleCompact two-stage multi-point regulation assembly on a stainless steel frame for turn-key field installation.Test benches and multi-point calibration stations

Datasheet and Documentation

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